Roxana Rezvani Naraghi
Events
Roxana Rezvani Naraghi
Function Owner for Overlay Metrology Sensors | ASML
About the Speaker
Roxana Rezvani Naraghi, Ph.D., is the Function Owner for Overlay Metrology Sensors at ASML, where she leads the development and architecture of current and next‑generation optical metrology technologies. Since joining ASML in 2017, she has held progressively senior roles across functional ownership, functional architecture, and advanced research. Her career has focused on advancing precision optical sensors that enable state‑of‑the‑art semiconductor lithography. Roxana earned her Ph.D. in Optics from the College of Optics and Photonics (CREOL) at the University of Central Florida, where she specialized in light–matter interactions, statistical optics, and optical metrology. With more than sixteen years of experience in optical sensor development and extensive leadership of multidisciplinary R&D teams, she is known for bridging fundamental physics with complex systems engineering. Roxana plays a key role in shaping ASML’s overlay metrology roadmap and continues to drive the development of optical technologies critical to the future of semiconductor manufacturing.
