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23 May 2024

OPTOMAN Introduces IBS Coated Laser Mirror with Exceptional Reflectivity for Excimer ArF Lasers

OPTOMAN has unveiled its latest advancement in optical technology: the IBS (Ion Beam Sputtering) coated laser mirror, specifically designed for Excimer ArF lasers. This state-of-the-art mirror boasts an unprecedented reflectivity of over 98% at 193 nm, AOI=45°, marking a significant enhancement in laser system performance.

The new IBS-coated laser mirror, coating code LLM290, leverages cutting-edge technology to deliver superior reflectivity, surpassing current market standards. This breakthrough ensures minimal laser energy loss, optimizing efficiency and effectiveness for advanced laser applications in semiconductor manufacturing or LASIK (Laser-Assisted In Situ Keratomileusis) surgery.

Key Features:

High Reflectivity: The LLM290 mirror exceeds HRa > 98% @ 193 nm, AOI=45° offering unparalleled performance compared to standard market options.

Advanced Coating Technology: Utilizing IBS coating, the mirror provides enhanced durability and environmental resistance, guaranteeing long-term reliability.

Caption: Reflectivity Performance Graph

Dielectric coating materials: These mirrors are coated using hard dielectric materials, therefore mirrors are free from scattering and prone to coating degradation. However, these oxide coatings are suitable only for beam delivery systems as the fluoride gas environment inside resonators would damage the coating.

The HR>98% mirror generates significantly lower losses compared to the market standard HR>96% mirrors in a typical ArF laser beam delivery system with 5 mirrors. Specifically, the total loss for the HR>98% mirror is approximately 9.61%, while the HR>96% mirror results in a total loss of about 18.46%. This considerable difference highlights the importance of using high-reflectivity mirrors to enhance the efficiency and performance of laser systems.

These mirrors can be found at OPTOSHOP.



Born in Vilnius, Lithuania, OPTOMAN is a coatings SuperHero that designs, develops, and manufactures advanced IBS thin film coatings. OPTOMAN digs deep into each application in order to provide customized and application-optimized laser optics that feature high LIDT, longevity and reliability so that you would benefit from a lower total cost of ownership.

Lukas Ceizaris

Chief Marketing Officer


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