Compact EUV & X-Ray Light Sources (EUVXRAY)

Emerging, compact extreme-ultraviolet (EUV) and X-ray sources that exhibit high brightness and are small enough to be installed in laboratories at educational and research institutions, manufacturing facilities, hospitals, and other suitable sites, will revolutionize scientific and technical disciplines, complementing both existing and future large-scale synchrotron radiation and free-electron laser sources. Applications span diverse fields, including biomedical, semiconductor manufacturing, fundamental and applied research, environmental engineering, industrial non-destructive testing and screening and defense and security.

The Compact EUV and X-ray Light Source meeting aims to assemble experts in both source technologies and their applications to present recent advances, exchange ideas and improve community wide understanding of current and future source capabilities as well as application needs. At this meeting the latest results in the development of these sources will be presented as well as ongoing efforts to mature the technology so that they meet the requirements needed to transition the technology to industrial and medical applications. Conference topics will include the latest development in both source technologies and applications, covering EUV through hard X-ray spectral regime.

The co-location of this meeting with the High-Intensity Sources and High-Field Phenomena (HILAS), Mid-Infrared Coherent Sources (MCS), and Laser Application (LAC) meetings provides a unique opportunity to expand interaction with multidisciplinary groups that share a broad range of interests and technological goals.

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Chairs

Lahsen Assoufid

Argonne National Laboratory, United States,
Chair

Patrick Naulleau

EUV Tech, United States,
Chair

Franz Kaertner

Deutsches Elektronen-Synchrotron, Germany,
Program Chair

Hiroshi Kawata

High Energy Accelerator Research Org, Japan,
Program Chair

Manasa Medikonda

IBM TJ Watson Research Center, United States,
Program Chair

Jorge Rocca

Colorado State University, United States,
Program Chair

Committee Members

• Lahsen Assoufid, Argonne National Laboratory, United States, Chair
• Patrick Naulleau, EUV Tech, United States, Chair
• Franz Kaertner, Deutsches Elektronen-Synchrotron, Germany, Program Chair
• Hiroshi Kawata, High Energy Accelerator Research Org, Japan, Program Chair
• Manasa Medikonda, IBM TJ Watson Research Center, United States, Program Chair
• Jorge Rocca, Colorado State University, United States, Program Chair