Compact EUV & X-Ray Light Sources (EUVXRAY)

Emerging, compact extreme-ultraviolet and x-ray sources that exhibit high brightness and are small enough to be installed in laboratories at educational and research institutions, manufacturing facilities, hospitals and other suitable sites, will revolutionize scientific and technical disciplines, complementing both existing and future large scale synchrotron radiation and free-electron laser sources.

Applications span a wide range including biomedical, semiconductor manufacturing, fundamental and applied research, environmental engineering, industrial non-destructive testing and screening and defense and security.

The aim of the Compact EUV & X-Ray Light Sources Topical Meeting (EUVXRAY) is to assemble experts in both source technologies and their applications to present and exchange ideas and improve community wide understanding of current and future source capabilities and current and future application needs. The latest results in the development of these sources are presented as well as descriptions of efforts to mature the technology so they meet the requirements needed in order to transition the technology to industrial and medical applications. Topics include the latest development in source technologies and applications in the EUV through hard-ray regime.

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Chairs

Lahsen Assoufid

Argonne National Laboratory, United States,
Chair

Patrick Naulleau

EUV Tech, United States,
Chair

Franz Kaertner

Deutsches Elektronen-Synchrotron, Germany,
Program Chair

Hiroshi Kawata

High Energy Accelerator Research Org, Japan,
Program Chair

Manasa Medikonda

IBM TJ Watson Research Center, United States,
Program Chair

Jorge Rocca

Colorado State University, United States,
Program Chair

Committee Members

• Lahsen Assoufid, Argonne National Laboratory, United States, Chair
• Patrick Naulleau, EUV Tech, United States, Chair
• Franz Kaertner, Deutsches Elektronen-Synchrotron, Germany, Program Chair
• Hiroshi Kawata, High Energy Accelerator Research Org, Japan, Program Chair
• Manasa Medikonda, IBM TJ Watson Research Center, United States, Program Chair
• Jorge Rocca, Colorado State University, United States, Program Chair