Plenary, Keynote and Tutorial Speakers
Plenary, Tutorial and Keynote Speakers
Plenary Speakers
Burn-Jeng Lin
Plenary: Improving IC A Million Times with Optical Lithography
The minimum feature size of Integrated Circuits has been reduced from 5 micrometers to 5 nanometers in 21 steps over almost half of a century. The feature size has been reduced from wavelengths to 1/27th of a wavelength. This talk highlights the techniques used to achieve this tremendous achievement.
About the Speaker
Dr. Lin received his PhD from Ohio State University and currently serves as the Distinguished Professor and Dean of NTHU College of Semiconductor Research. He consecutively worked at IBM T.J. Watson Research Center, Linnovation and TSMC as Department Manager, President and VP in Research, respectively. Dr. Lin is a member of the US Academy of Engineering, Academician of Academia Sinica, ITRI Laureate, Distinguished Alumni of National Taiwan University and OSU, IEEE and SPIE Fellows. Dr. Lin is a recipient of various awards, including the Innovation Award from the President of Taiwan ROC, Future-Science Prize on Mathematics and Computer Science, IEEE Nishizawa Medal, IEEE Brunetti Award, OSU Benjamin-Lamme Medal, two TSMC Innovation and Customer-Partnership Awards, SPIE Zernike Award (first recipient), Ten IBM Invention Plateaus and IBM Outstanding-Technical-Contribution Award.
Jianwei Miao
Plenary: Computational Microscopy with Coherent Diffractive Imaging and Ptychography
Computational microscopy based on coherent diffractive imaging and ptychography unifies microscopy and crystallography by replacing lenses with diffraction and algorithms, enabling imaging across nine orders of magnitude in length scale, from sub-angstrom atomic structures to centimeter-scale tissues.
About the Speaker
Jianwei (John) Miao is Professor of Physics and Astronomy at UCLA. He pioneered computational microscopy by unifying crystallography with microscopy using coherent diffraction and algorithms, replacing lenses with computation. In 1999, he achieved the first experimental coherent diffractive imaging, laying the foundation for modern ptychography and transforming nanoscale and atomic-scale imaging across synchrotrons, XFELs, HHG, optical microscopy and electron microscopy. Building on this foundation, he pioneered atomic electron tomography (AET) in 2012 for 3D atomic imaging without crystallinity and in 2021 reported the first 3D atomic structure of an amorphous solid. He recently advanced ptychographic AET to image individual light atoms in 3D with picometer precision. His honors include the Werner Meyer-Ilse Memorial Award, Sloan Fellowship, Innovation in Materials Characterization Award, Joseph F. Keithley Award for Advances in Measurement Science and election as APS and MRS Fellow.
