Hiroo Kinoshita

Hiroo Kinoshita is an expert with over 40 years of experience in lithography. He worked for Nippon Telegraph and Telephone and University of Hyogo, where he developed an Extreme Ultraviolet Lithography (EUVL) experimental system. He has authored over 170 technical paper on EUVL. He is a Fellow of the Society and recipient of the 2012 Joseph Fraunhofer Award/Robert M. Burley Prize.

Document Created: 5 Feb 2020
Last Updated: 17 Sep 2021