Compact EUV & X-Ray Light Sources (EUVXRAY)

Compact EUV & X-Ray Light Sources (EUVXRAY)

1. EUV Through Hard-X-ray Sources and Components
   • Laser and discharge produced plasma sources
   • High-harmonic generation sources
   • X-ray laser sources
   • Compact Free-electron lasers
   • Inverse Compton scattering sources
   • High power laser beam diagnostics tools
   • Radio frequency cavities, and guns
   • Undulators and wigglers
   • Magnets and multiband achromats
   • Others
2. Applications
   • EUV lithography and mask inspection
   • Semiconductor wafer inspection and metrology
   • Phase contrast imaging and tomography
   • Medical and clinical imaging
   • Biological imaging
   • Macromolecular crystallography
   • Cultural heritage studies
   • Non-destructive testing
   • Ultrafast and dynamic studies
   • Wide field imaging
   • Others
3. Enabling Technologies (such as optics, detectors, beam and wavefront diagnostic tools, and other instruments)
4. Data acquisition, Management and Processing