Freeform 3D Structured Silicon Photodiodes

Since the 1960s, silicon photodiodes have been a globally accepted standard for optical applications in the spectral range from 200 to 1200 nm. However, when combined with other MEMS technologies, new functions and application-specific designs are still possible today.

This webinar focuses on new possibilities arising from technologies for the three-dimensional structuring of silicon. After a brief insight into the technology, examples will be used to show which new functions can be realised. These include the following:

• inclined active surfaces that are used as light angle sensors
• free outer contours of the chip
• cavities in which light sources such as LEDs or lasers are integrated
• openings through which optical elements, fibres, or free beams can pass
• partially transparent photodiodes

Subject Matter Level: Intermediate - Assumes basic knowledge of the topic

What You Will Learn:

• MEMS and photodiode technology insights
• Additional functionalities beyond the state of the art illustrated by practical examples

Who Should Attend:

• Engineers and scientists from development departments
• Measuring device developers

About the Presenter: Martin Schädel from CiS Forschungsinstitut für Mikrosensorik GmbH

Dr. Schädel studied Technical Physics at the Technical University Ilmenau, Germany, and worked in the photovoltaic industry. For his doctorate, he was involved with optical characterization and simulation of organic solar cells. Since 2012, Dr. Schädel has been working at the CiS Research Institute on different topics and in different positions within the field of optical microsensors. Since 2019, he has served as director of the micro-opto-electro-mechanical systems (MOEMS) business unit.