Miniaturized FTIR MEMS Spectrometer for Detecting Energy Related Gases

The concept of a miniaturized MEMS optical bench is introduced, through which a compact spectral sensor is realized to monitor multiple gaseous components using a single device. The device is an open-path Fourier-transform infrared (FTIR) gas analyzer based on a mid-infrared (MIR) MEMS spectrometer, produced using MEMS technologies. This unique product gained the Prism award in the Photonics West conference 2014. The device was deployed inside a district-scale climatic chamber to demonstrate its capabilities in monitoring the gaseous components produced by a car engine. Preliminary results of laboratory-scale measurements intended to assess the potential of the proposed spectral sensor to screen gaseous compounds are presented.

Subject Matter Level: Intermediate - Assumes basic knowledge of the topic

What You Will Learn:
• MEMS miniaturized optical bench concepts
• Fourier-transform infrared (FTIR) MEMS spectrometer
• Gas analysis using mid-infrared (MIR) MEMS spectrometry

Who Should Attend:
• Micro-photonic systems engineers and scientists
• Optoelectronics, optical MEMS and integrated optics engineers and graduate students
• Engineers working on spectroscopy, optical fiber technology and applications

About the Presenter: Diaa A. Khalil from Faculty of Engineering, Ain Shams University

Prof. Diaa Khalil has over 35 years of experience in microphotonic systems, including integrated optoelectronics and optical MEMS technology. He obtained his PhD from INPG, France, in 1993 and became Professor of Photonics at the Faculty of Engineering, Ain Shams University in 2004. He introduced courses in Integrated Optics, Optical MEMS, and Applied Optical Engineering for the post-graduate engineering students. He supervised more than 80 MSc and PhD theses in the fields of Optoelectronics, Applied Spectroscopy, Optical MEMS and integrated Optics. He is leading a group of scientists working in the field of photonic microsystems.

He was also the CTO of the Optical MEMS Division in Si-Ware Systems from 2007 - 2020, leading a group of talented engineers developing an innovative FTIR MEMS spectrometer, a unique product that gained the Prism award at Photonics West 2014. He is an author and co-author of more than 340 publications, four book chapters, and 1 e-book published by SPIE.